Vibration characteristics of the rotary table of large spin coater and its influencing factors

Abstract The rotary table vibration of the spin coater directly impacts quality coating film. In view unclear characteristics during operation, and its influencing factors considering spindle system are studied. Based on elastic contact theory multi-body theory, when parts flexible analyzed by establishing multi-rigid body coupling dynamics models, respectively. By comparing with measurement results, it is found that treatment load tray more consistent actual characteristics. study further analyzes effects unbalance table, speed, coaxiality spindle, perpendicularity results show influence under working conditions from highest to lowest degree tray, rotational speed table. This provides a reliable theoretical experimental basis for analysis structural design